电浆蚀刻设备

Electricity thick liquid etching device

Abstract

The utility model provides an electricity thick liquid etching device, the bottom electrode portion that sets up including last electrode portion, with last electrode portion relative interval, bottom electrode portion includes the plate electrode, locates cover on the plate electrode the anode film of plate electrode, side by side and mutual separating locate two suction table units on the anode film and establishing on the anode film and surround each suction table unit shield ring at edge all around, can handle two base plates simultaneously to use this electricity thick liquid etching device, compare under the same productivity with adoption prior art, can reduce the line equipment of producing quantity, improve the utilization ratio in factory building space.
本实用新型提供一种电浆蚀刻设备,包括上电极部、与上电极部相对间隔设置的下电极部;所述下电极部包括电极板、设于所述电极板上并覆盖所述电极板的阳极膜、并列且相互间隔设于所述阳极膜上的两吸附平台单元、及设在所述阳极膜上并包围每一吸附平台单元四周边缘的屏蔽环;能够同时对两片基板进行处理,从而使用该电浆蚀刻设备,与采用现有技术相比在相同的产能下,能够减少产线设备数量,提高厂房空间的利用率。

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